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UPC 9781118043578 Computational Lithography 

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ISBN 9781118043578 - Computational Lithography

ISBN 9781118043578
Computational Lithography

   Barcode ISBN 9781118043578

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Description 9781118043578
A Unified Summary of the Models and Optimization Methods in Computational LithographyOptical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction (OPC), phase shifting mask (PSM), and off-axis illumination (OAI) RET tools that use model-based mathematical optimization 9781118043578
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9 781118 043578
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New Link Scanned 9781118043578
2018-06-20 16:22:24

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