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UPC 9781118043578 Computational Lithography 

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ISBN 9781118043578 - Computational Lithography

ISBN 9781118043578

Computational Lithography
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Product Name: Computational Lithography

ISBN 9781118043578

Description : A Unified Summary of the Models and Optimization Methods in Computational LithographyOptical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction (OPC), phase shifting mask (PSM), and off-axis illumination (OAI) RET tools that use model-based mathematical optimization

ISBN 9781118043578 Computational Lithography

ISBN: 9781118043578
EAN-13: 9 781118 043578
ISBN-10, Asin and Amazon's sku: 1118043578
Gtin: 09781118043578

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EAN-13: 9 781118 043578
ISBN-10 , Asin and Amazon's sku: 1118043578
Gtin: 09781118043578